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Chris Zorman

Senior Associate Dean
Case School of Engineering
Professor
Department of Electrical, Computer, and Systems Engineering
Case School of Engineering

Develops materials and processing techniques for microsystems, especially for challenging applications.

Teaching Information

Teaching Interests

Solid state device physics, Linear circuits, nanotechnology, microelectromechanical systems, wearable electronics.

Research Information

Research Interests

Development of novel, enabling materials and the requisite processing techniques for micro- and nanoelectromechanical systems. Application areas include harsh environment MEMS, medical microsystems, and stretchable/flexible/printable electronics.

Awards and Honors

CSE Esprit de Corps Award
2018
CSE
Fellow
2017
American Vacuum Society
Faculty Research Award
2013
CSE

Professional Memberships

Jan. 1, 1991 - PRESENT, Fellow American Vacuum Society
Jan. 1, 1997 - PRESENT, Senior Member Institute of Electrical and Electronic Engineers

Publications

  • Chen, H., Jia, H., Zorman, C., & Feng, P. (2020). Determination of Elastic Modulus of Silicon Carbide (SiC) Thin Diaphragms via Mode-Dependent Duffing Nonlinear Resonances. Journal of Microelectromechanical Systems, 29 (5), 783-789.
  • Sui, Y., Hess-Dunning, A., Sankaran, R., & Zorman, C. (2020). Inkjet-Printed Hydrogen Peroxide Sensor With Sensitivity Enhanced by Plasma Activated Inorganic Metal Salt Inks. Journal of Microelectromechanical Systems, 29 (5), 1026-1031.
  • Chen, H., Jia, H., Zorman, C., & Feng, P. (2020). Determination of Elastic Modulus of Silicon Carbide (SiC) Thin Diaphragms via Mode-Dependent Duffing Nonlinear Resonances. Journal of Microelectromechanical Systems, 29 (5), 783-789.
  • Sui, Y., Hess-Dunning, A., Sankaran, R., & Zorman, C. (2020). Inkjet-Printed Hydrogen Peroxide Sensor With Sensitivity Enhanced by Plasma Activated Inorganic Metal Salt Inks. Journal of Microelectromechanical Systems, 29 (5), 1026-1031.
  • Sui, Y., & Zorman, C. (2020). Inkjet Printing of Metal Structures for Electrochemical Sensor Applications: A Review. Journal of the Electrochemical Society, 167 , 037571 .
  • Sui, Y., & Zorman, C. (2020). Inkjet Printing of Metal Structures for Electrochemical Sensor Applications: A Review. Journal of the Electrochemical Society, 167 (3), 037571.
  • Miller, C., Zorman, C., & Wnek, G. E. (2020). An Improved Tactile Sensing Device for Material Characterization via Friction-Induced Vibrations. Sensors and Actuators A: Physical, 303 (2020), 111824.
  • Seshadri, D., Li, R., Voos, J., Rowbottom, J., Alfes, C., Zorman, C., & Drummond, C. K. (2019). Wearable sensors for monitoring the internal and external workload of the athlete. npj Digital Medicine, 2 (1).
  • Seshadri, D., Li, R., Voos, J., Rowbottom, J., Alfes, C., Zorman, C., & Drummond, C. K. (2019). Wearable sensors for monitoring the physiological and biochemical profile of the athlete. npj Digital Medicine, 2 (1).
  • Seshadri, D., Li, R., Voos, J., Rowbottom, J., Alfes, C., Zorman, C., & Drummond, C. K. (2019). Wearable sensors for monitoring the internal and external workload of the athlete. npj Digital Medicine, 2 (1).
  • Seshadri, D., Li, R., Voos, J., Rowbottom, J., Alfes, C., Zorman, C., & Drummond, C. K. (2019). Wearable sensors for monitoring the physiological and biochemical profile of the athlete. npj Digital Medicine, 2 (1).
  • Sui, Y., Dai, Y., Liu, C., Sankaran, R., & Zorman, C. (2019). A New Class of Low-Temperature Plasma-Activated, Inorganic Salt-Based Particle-Free Inks for Inkjet Printing Metals. Advanced Materials Technologies.
  • Sui, Y., Dai, Y., Liu, C., Sankaran, R., & Zorman, C. (2019). A New Class of Low-Temperature Plasma-Activated, Inorganic Salt-Based Particle-Free Inks for Inkjet Printing Metals. Advanced Materials Technologies.
  • Sui, Y., Dai, Y., Liu, C., Sankaran, R., & Zorman, C. (2019). A New Class of Low-Temperature Plasma-Activated, Inorganic Salt-Based Particle-Free Inks for Inkjet Printing Metals. Advanced Materials Technologies.
  • Chen, H., Jia, H., Liao, W., Pashaei, V., Arutt, C., McCurdy, M., Zorman, C., Reed, R., Schrimpf, R., & Alles, M. (2019). Probing heavy ion radiation effects in silicon carbide (SiC) via 3D integrated multimode vibrating diaphragms. APPLIED PHYSICS LETTERS, 114 (10).
  • Sui, Y., Hess-Dunning, A., Wei, P., Penzer, E., Sankaran, R., & Zorman, C. (2019). Chemically-active, reduced graphene oxide structures fabricated by inkjet printing and low temperature plasma conversion. Advanced Materials Technologies, 4 , 1900834.
  • Daia, Y., Chiu, L., Sui, Y., Dai, Q., Penumutchu, S., Jain, N., Dai, L., Zorman, C., Tolbert, B., Sankaran, R., & Liu, C. (2019). Nanoparticle based simple electrochemical biosensor platform for profiling of protein-nucleic acid interactions. TALANTA, 195 , 46-54.
  • Slipchenko, M., Jia, H., Liao, Y., Pashaei, V., Arutt, C., McCurdy, M., Zorman, C., Reed, A., Schrimpf, R., & Alles, M. (2019). Probing Heavy Ion Radiation Effects in Silicon Carbide (SiC) via 3D Integrated Multimode Diaphragms. Applied Physics Letters.
  • Sui, Y., Kreider, L., Bogie, K., & Zorman, C. (2019). Fabrication of a Silver-based Thermistor on Flexible, Temperature Sensitive Substrates Using a Low Temperature Inkjet Printing Technique. IEEE Sensors Letters, 3 , 2500704.
  • Chong, H., Lou, J., Bogie, K., Zorman, C., & Majerus, S. (2019). Vascular Pressure–Flow Measurement Using CB-PDMS Flexible Strain Sensor. IEEE Transactions on Biomedical Circuits and Systems, 13 , 1451-1461.
  • Islam, M., Singh, S., Lee, J., Xie, Y., Zorman, C., & Mandal, S. (2019). A Programmable Sustaining Amplifier for Flexible Multimode MEMS-Referenced Oscillators. IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS I-REGULAR PAPERS, 66 (4), 1405-1418.
  • Sui, Y., Ghosh, S., Miller, C., Pappas, D., Mohan Sankaran, R., & Zorman, C. (2018). Tunable resistivity in ink-jet printed electrical structures on paper by plasma conversion of particle-free, stabilizer-free silver inks. Journal of Vacuum Science and Technology A Vacuum Surfaces and Films, 36 (5), 051302.
  • Zheng, X., Lee, J., Rafique, S., Karim, M., Han, L., Zhao, H., & Zorman, C. (2018). Ga 2 O 3 NEMS Oscillator for Real-Time Middle Ultraviolet (MUV) Light Detection. IEEE Electron Device Letters, 39 (8), 1230-1233.
  • Zheng, X., Lee, J., Rafique, S., Han, L., Zorman, C., & Zhao, H. (2018). Free-Standing �-Ga2O3 Thin Diaphragms. Journal of Electronic Materials, 47 (2), 973-981.
  • Islam, M., Singh, S., Lee, J., Xie, Y., Zorman, C., Feng, P., & Mandal, S. (2018). A Programmable Sustaining Amplifier for Flexible Multimode MEMS-Referenced Oscillators. IEEE Transactions on Circuits and Systems I: Regular Papers.
  • Liu, T., Premasiri, K., Sui, Y., Zhan, X., Mustafa, Haithem A. B., X., Akkus, O., Zorman, C., Gao, Xuan P. A., C., & Sankaran, R. (2018). Direct, Transfer-Free Growth of Large-Area Hexagonal Boron Nitride Films by Plasma-Enhanced Chemical Film Conversion (PECFC) of Printable, Solution-Processed Ammonia Borane. ACS APPLIED MATERIALS & INTERFACES, 10 (50), 43936-43945.
  • Zheng, X., Lee, J., Rafique, S., Karim, M., Han, L., Zhao, H., & Zorman, C. (2018). beta-Ga2O3 NEMS Oscillator for Real-Time Middle Ultraviolet (MUV) Light Detection. IEEE ELECTRON DEVICE LETTERS, 39 (8), 1230-1233.
  • Zheng, X., Lee, J., Rafique, S., Han, L., Zorman, C., & Zhao, H. (2017). Free-Standing β-Ga2O3 Thin Diaphragms. Journal of Electronic Materials, 47 , 973-981.
  • Zorman, C., Lee, J., Rafique, S., Han, L., & Zhao, H. (2017). Ultrawide Bandgap β-Ga2O3 Nanomechanical Resonators with Spatially Visualized Multimode Motion. ACS Applied Materials and Interfaces, 9 , 43090-43097.
  • Rafique, S., Han, L., Lee, J., Zheng, X., Zorman, C., & Zhao, H. (2017). Synthesis and characterization of Ga 2 O 3 nanosheets on 3C-SiC-on-Si by low pressure chemical vapor deposition. Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structures, 35 (1).
  • Ghosh, S., Boris, D., Hernández, S., Zorman, C., Walton, S., & Sankaran, R. (2017). Correlating charge fluence with nanoparticle formation during in situ plasma synthesis of nanocomposite films. Plasma Processes and Polymers.
  • Rafique, S., Han, L., Lee, J., Zheng, X., Zorman, C., Feng, F., & Zhao, H. (2017). Synthesis of Ga2O3 Nanosheet on 3C-SiC-on-Si by Low Pressure Chemical Vapor Deposition. J. Vac. Sci. Technol. B, 35 , 011208.
  • Yang, R., Lee, J., Ghosh, S., Tang, H., Sankaran, R., & Zorman, C. (2017). Tuning Optical Signatures of Single- and Few-Layer MoS 2 by Blown-Bubble Bulge Straining up to Fracture. Nano Letters, 17 (8), 4568-4575.
  • Ghosh, S., Klek, E., Zorman, C., & Sankaran, R. (2017). Microplasma-induced in situ formation of patterned, stretchable electrical conductors. ACS Macro Letters, 6 , 194-199.
  • Zamani, H., Lee, J., Rajgopal, S., & Zorman, C. (2017). 3C-SiC microdisk mechanical resonators with multimode resonances at radio frequencies. Journal of Micromechanics and Microengineering.
  • Rafique, S., Han, L., Zorman, C., & Zhao, H. (2016). Synthesis of Wide Bandgap ß-Ga 2 O 3 Rods on 3C-SiC-on-Si. Crystal Growth and Design [15287483], 16 (1), 511-517.
  • Ghosh, S., Ostrowski, E., Yang, R., Debnath, D., Zorman, C., & Sankaran, R. (2016). Atmospheric-pressure plasma reduction of metal cation-containing polymer films to produce electrically conductive nanocomposites by an electrodiffusion mechanism. Plasma Chemistry Plasma Processing.
  • Rafique, S., Han, L., Zorman, C., & Zhao, H. (2015). Synthesis of Wide Bandgap β-Ga2O3 Rods on 3C-SiC-on-SiC. Crystal Growth and Design, 16 (1), 511–517.
  • Howe, D., Dunning, J., Zorman, C., Garverick, S., & Bogie, K. (2015). Development of an Integrated Surface Stimulation Device for Systematic Evaluation of Wound Electrotherapy. ANNALS OF BIOMEDICAL ENGINEERING, 43 (2), 306-313.
  • Yang, R., & Zorman, C. (2015). High frequency torsional-mode nanomechanical resonators enabled by very thin nanocrystalline diamond diaphragms. , 54 , 19-25.
  • Trevino, J., Fu, X., Mehregany, M., & Zorman, C. (2014). Doped Polycrystalline 3C-SiC films with Low Stress for MEMS Part I: Deposition Conditions and Film Properties. Journal of Micromechanics and Microengineering, 24 , 035013-035020.
  • Ghosh, S., Yang, R., Kaumeyer, M., Zorman, C., Rowan, S. J., & Sankaran, R. J. (2014). Fabrication of Electrically Conductive Metal Patterns at the Surface of Polymer Films by Microplasma-Based Direct Writing.. ACS applied materials & interfaces, 6 , 3099-3104 .
  • Fu, X., Trevino, J., Mehregany, M., & Zorman, C. (2014). Doped Polycrystalline 3C-SiC Films With Low Stress for MEMS Part II: Characterization Using Micromachined Structures. Journal of Micromechanics and Microengineering, 24 , 065001-065009 .
  • Hess-Dunning, A., Tyler, D. J., Harris, J. J., Capadona, J. R., Weder, C. R., Rowan, S. J., & Zorman, C. J. (2014). Microscale Characterization of a Mechanically Adaptive Polymer Nanocomposite With Cotton-Derived Cellulose Nanocrystals for Implantable BioMEMS. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 23 (4), 774-784.
  • Hess-Dunning, A., Tyler, D. J., Harris, J. J., Capadona, J. R., Weder, C. R., Rowan, S. J., & Zorman, C. J. (2014). Microscale Characterization of a Mechanically Adaptive Polymer Nanocomposite with Cotton-Derived Cellulose Nanocrystals for Implantable BioMEMS. Journal of Microelectromechanical Systems, 23 , 774-784 .
  • Ghosh, S., Yang, R., Kaumeyer, M., Zorman, C., Rowan, S. J., & Sankaran, R. J. (2014). Fabrication of electrically-conductive metal patterns at the surface of polymer films by microplasma-based direct writing. ACS Applied Materials & Interfaces.
  • Jordan, J., Simons, R., & Zorman, C. (2014). Contactless Radio Frequency Probes for High Temperature Characterization of Microwave Integrated Circuits. Electronics Letters, 50 , 817-819 .
  • Hess-Dunning, A., Tyler, D. J., Harris, J. J., Capadona, J. R., Weder, C. R., Rowan, S. J., & Zorman, C. J. (2014). Microscale characterization of a mechanically adaptive polymer nanocomposite with cotton-derived cellulose nanocrystals for implantable BioMEMS. Journal of Microelectromechanical Systems, 23 (4), 774--784.
  • Hess-Dunning, A., Smith, L., & Zorman, C. (2014). Polynorbornene as an Enabling Structural Material for Polymer-based BioMEMS. Journal of Applied Polymer Science, 131 , 40969.
  • De Leon, A., Barnes, A., Thomas, P., O'Donnell, J., Zorman, C., & Advincula, R. C. (2014). Transfer Printing of Self-folding Polymer-Metal Bilayer Particles. ACS Applied Materials and Interfaces, 6 , 22695-22700 .
  • Hess, A., Potter, K., Tyler, D. J., Zorman, C. J., & Capadona, J. R. (2013). Environmentally-controlled microtensile testing of mechanically-adaptive polymer nanocomposites for ex vivo characterization.. Journal of visualized experiments : JoVE.
  • Falk, A., Buckley, B., Calusine, G., Koehl, W., Dobrovitski, V., Politi, A., Zorman, C., & Awschalom, D. (2013). Polytype control of spin qubits in silicon carbide.. Nature communications, 4 , 1819.
  • Hess, A., Potter, K., Tyler, D. J., Zorman, C. J., & Capadona, J. R. (2013). Environmentally-controlled microtensile testing of mechanically-adaptive polymer nanocomposites for ex vivo characterization. Journal of visualized experiments: JoVE.
  • Hess, A., Potter, K., Tyler, D. J., Zorman, C. J., & Capadona, J. R. (2013). 环境控制机械自适应聚合物纳米复合材料的微拉伸测试. .
  • Lachhman, S., Zorman, C., & Ko, W. H. (2012). Adhesion and Moisture Barrier Characteristics of Roller-Cast Polydimethylsiloxane Encapsulants for Implantable Microsystems.. Proceedings of IEEE Sensors / IEEE International Conference on Sensors ; sponsored by the IEEE Sensor Council. IEEE International Conference on Sensors, 2012 , 1-4.
  • Capadona, J. R., Tyler, D. J., Zorman, C. J., Rowan, S. J., & Weder, C. J. (2012). Mechanically adaptive nanocomposites for neural interfacing. MRS BULLETIN, 37 (6), 581-589.
  • Smith, L., Fissell, W., Fleischman, A., & Zorman, C. (2012). A low-cost automated streaming potential measurement system.. Journal of laboratory automation, 17 (2), 125-33.
  • Lachhman, S., Zorman, C., & Ko, W. H. (2012). Multi-layered poly-dimethylsiloxane as a non-hermetic packaging material for medical MEMS.. Conference proceedings : ... Annual International Conference of the IEEE Engineering in Medicine and Biology Society. IEEE Engineering in Medicine and Biology Society. Conference, 2012 , 1655-8.
  • Smith, L., Fleischman, A., Fissell, W., & Zorman, C. (2012). A Low-Cost Automated Streaming Potential Measurement System. , 17 , 125-133.
  • Harris, J., Hess, A., Rowan, S. J., Weder, C. J., Zorman, C. J., Tyler, D. J., & Capadona, J. R. (2011). In vivo deployment of mechanically adaptive nanocomposites forintracortical microelectrodes. JOURNAL OF NEURAL ENGINEERING, 8 (4, SI).
  • Hess, A., Capadona, J. R., Shanmuganathan, K. R., Hsu, L. R., Rowan, S. J., Weder, C. J., Tyler, D. J., & Zorman, C. J. (2011). Development of a stimuli-responsive polymer nanocomposite towardbiologically optimized, MEMS-based neural probes. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 21 (5).
  • Barnes, A., Hess, A., & Zorman, C. (2011). Development of a packaging system for clinical evaluation of a nanocomposite-based neural electrode array fabricated from a chemoresponsive polymer substrate. , 24 , 17-25 .
  • Rajasekhara, S., Neuner III, B., Zorman, C., Ferro, G., Shvets, G., Ferreira, P., & Kovar, D. (2011). The influence of impurities and planar defects on the optical infrared properties of silicon carbide films. , 98 , 191904.
  • Hess, A., Capadona, J. R., Shanmuganathan, K. R., Hsu, L. R., Rowan, S. J., Weder, C. J., Tyler, D. J., & Zorman, C. J. (2011). Development of a stimuli-responsive polymer nanocomposite toward biologically-optimized MEMS-based neural probes. , 21 , 54009-54017.
  • Hess, A., Sabens, D., Martin, H., & Zorman, C. (2011). Diamond-on-polymer microelectrode arrays fabricated using a chemical release transfer process. , 20 , 867 – 875.
  • Ferrell, N., Groszek, J., Li, L., Smith, L., Butler, R., Zorman, C., Roy-Chowdhuri, S., & Fissell, W. (2011). The basal lamina secreted by MDCK cells has size- and charge-selective properties. , 300 , F86-F90.
  • Fu, X., Dunning, J., Mehregany, M., & Zorman, C. (2011). Low Stress Polycrystalline SiC Thin Films Suitable for MEMS Applications. , 158 , H675-H680.
  • Smith, L., Fleischman, A., Fissell, W., Zorman, C., & Roy-Chowdhuri, S. (2011). A system to measure minute hydraulic permeability of nanometer scale devices in a non-destructive manner. , 22 , 45802-45811.
  • Ferrell, N., Groszek, J., Li , L., Smith, L., Butler, R., Zorman, C., Roy-Chowdhuri, S., & Fissell, W. (2011). Basal lamina secreted by MDCK cells has size- and charge-selective properties.. American journal of physiology. Renal physiology, 300 (1), F86-90.
  • Smith, L., Goldman, K., Fissell, W., Fleischman, A., Zorman, C., & Roy-Chowdhuri, S. (2011). Removal of Endotoxin from Aqueous Solutions Using Micromachined Silicon Nanoporous Membranes. , 21 , 54029-54036.
  • Groszek, J., Li , L., Ferrell, N., Smith, L., Zorman, C., Hofmann, C., Roy-Chowdhuri, S., & Fissell, W. (2010). Molecular conformation and filtration properties of anionic Ficoll.. American journal of physiology. Renal physiology, 299 (4), F752-7.
  • Feng, J., Matheny, M., Zorman, C., Mehregany, M., & Roukes, M. (2010). Low voltage nanoelectromechanical switches based on silicon carbide nanowires.. Nano letters, 10 (8), 2891-6.
  • Metheny, M., Zorman, C., Mehregany, M., & Roukes, M. (2010). Low voltage nanoelectromechanical switches based on silicon carbide nanowires. , 10 , 2891–2896.
  • Hess, A., Sabens, D., Martin, H., & Zorman, C. (2010). Polycrystalline diamond-on-polymer electrode arrays fabricated using a polymer-based transfer process. , 13 , J129-J131.
  • Du, J., & Zorman, C. (2010). The process and mechanism of low temperature silicon carbide-to-silicon direct bonding using amorphous hydrogenated silicon carbide films. , 2 , 100-107.
  • Groszek, J., Li, B., Ferrell, N., Smith, L., Zorman, C., Hofmann, C., Roy-Chowdhuri, S., & Fissell, W. (2010). Molecular conformation and filtration properties of anionic Ficoll. , 299 , F752-F757.
  • Ferrara, L., Fleischman, A., Dunning, J., Zorman, C., & Roy-Chowdhuri, S. (2007). Effects of biomedical sterilization processes on performance characteristics of MEMS pressure sensors.. Biomedical microdevices, 9 (6), 809-14.
  • Henry Huang, X., Zorman, C., Mehregany, M., & Roukes, M. (2003). Nanoelectromechanical systems: Nanodevice motion at microwave frequencies.. Nature, 421 (6922), 496.
  • Kotzar, G., Freas, M., Abel, P., Fleischman, A., Roy-Chowdhuri, S., Zorman, C., Moran, J., & Melzak, J. (2002). Evaluation of MEMS materials of construction for implantable medical devices.. Biomaterials, 23 (13), 2737-50.
  • Chong, H., Majerus, S., Bogie, K., & Zorman, C. (). Non-Hermetic Packaging of Biomedical Microsystems from a Materials Perspective: A Review. Medical Devices and Sensors, 3 (6), e10082.
  • Weder, C., Capadona, J. R., Shanmuganathan, K. R., Harris, J. R., Tyler, D. J., Zorman, C. J., & Rowan, S. J. (). Mechanically Adaptive Polymer Nanocomposites. .

Education

PhD
Physics
Case Western Reserve University
1994
MS
Physics
Case Western Reserve University
1991
Bachelor of Arts
Economics
The Ohio State University
1988
BS
Physics
The Ohio State University
1988

Additional Information

Patents Received

  • 2016, "INTERCONNECT DEVICES, SYSTEMS, AND METHODS FOR BRIDGING ELECTRONIC DEVICES" 9,486,619, Chris Zorman, Dustin Tyler, Yuesho Xu, & Allison Hess-Dunning.
  • 2016, "Integrated Surface Stimulation Device for Pain Management and Wound Therapy" 9,320,907, Chris Zorman, Kath Bogie, Steven Garverick, & Daniel Howe.
  • 2012, "Composition comprising silicon carbide" 8,153,280, Chris Zorman, Mehran Mehregany, Jeremy Dunning, & Xiao-an Fu.
  • 2011, "Silicon carbide and other films and method of deposition" RE42887 E1, Chris Zorman, Mehran Mehregany, Jeremy Dunning, & Xiao-an Fu.

Patents Pending

  • 2016, "Integrated Surface Stimulation Device for Wound Therapy and Infection Control" 20160287868, Chris Zorman, K Bogie, D Howe, & SL Garverick.
  • 2014, "MICROPERFUSION TISSUE INTERROGATOR" 20150147771, Chris Zorman, Ulrich Hopfer, & Andrew Resnick.
  • 2010, "DIAMOND APPARATUS AND METHOD OF MANUFACTURE" 20110086207, Chris Zorman, Heidi Martin, Allison Hess, David Sabens, Clifford Hayman, & Jeffrey Halpern.